{"id":2570,"date":"2020-04-01T00:00:00","date_gmt":"2020-04-01T00:00:00","guid":{"rendered":"https:\/\/www.liaison.kit.ac.jp\/chuumokukenkyu\/?post_type=featured&#038;p=2570"},"modified":"2023-07-06T05:02:41","modified_gmt":"2023-07-06T05:02:41","slug":"chuumokukenkyu202004","status":"publish","type":"featured","link":"https:\/\/www.liaison.kit.ac.jp\/chuumokukenkyu\/featured\/chuumokukenkyu202004\/","title":{"rendered":"\u30df\u30b9\u30c8CVD\u6cd5\u306b\u3088\u308b\u534a\u5c0e\u4f53\u5f62\u6210\u6280\u8853\uff5e\u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9\u5fdc\u7528\u304b\u3089\u30ca\u30ce\u69cb\u9020\u5f62\u6210\u307e\u3067\uff5e\uff08\u897f\u4e2d\u6d69\u4e4b \u51c6\u6559\u6388\uff09"},"content":{"rendered":"\n<div class=\"wp-block-cover alignfull frontpage_header sme-animation-fade-in\" data-sme-animation-duration=\"2\"><span aria-hidden=\"true\" class=\"wp-block-cover__background has-background-dim\"><\/span><img decoding=\"async\" width=\"1280\" height=\"960\" src=\"https:\/\/www.liaison.kit.ac.jp\/chuumokukenkyu\/wp-content\/uploads\/2023\/03\/chuumokukenkyu202004_00.jpg\" class=\"wp-block-cover__image-background wp-post-image\" alt=\"\" data-object-fit=\"cover\" srcset=\"https:\/\/www.liaison.kit.ac.jp\/chuumokukenkyu\/wp-content\/uploads\/2023\/03\/chuumokukenkyu202004_00.jpg 1280w, https:\/\/www.liaison.kit.ac.jp\/chuumokukenkyu\/wp-content\/uploads\/2023\/03\/chuumokukenkyu202004_00-600x450.jpg 600w, https:\/\/www.liaison.kit.ac.jp\/chuumokukenkyu\/wp-content\/uploads\/2023\/03\/chuumokukenkyu202004_00-768x576.jpg 768w\" sizes=\"(max-width: 1280px) 100vw, 1280px\" \/><div class=\"wp-block-cover__inner-container is-layout-flow wp-block-cover-is-layout-flow\">\n<div class=\"wp-block-snow-monkey-blocks-container smb-container c-container\"><div class=\"smb-container__body u-slim-width is-layout-constrained wp-block-container-is-layout-constrained\">\n<p><span style=\"color: #ffffff\" class=\"sme-text-color\">2020\u5e744\u6708<\/span><\/p>\n\n\n\n<h1 class=\"wp-block-heading has-sm-text-alt-color has-text-color\">\u30df\u30b9\u30c8CVD\u6cd5\u306b\u3088\u308b\u534a\u5c0e\u4f53\u5f62\u6210\u6280\u8853<br><span style=\"color: #ffffff\" class=\"sme-text-color\"><span class=\"sme-font-size has-sm-medium-font-size\">\uff5e\u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9\u5fdc\u7528\u304b\u3089\u30ca\u30ce\u69cb\u9020\u5f62\u6210\u307e\u3067\uff5e<\/span><\/span><\/h1>\n\n\n\n<div class=\"wp-block-group is-nowrap is-layout-flex wp-container-core-group-is-layout-1 wp-block-group-is-layout-flex\"><div class=\"taxonomy-index post-meta-index wp-block-post-terms\"><a href=\"https:\/\/www.liaison.kit.ac.jp\/chuumokukenkyu\/index\/electrical-and-electronic-engineering\/\" rel=\"tag\">04.\u96fb\u6c17\u96fb\u5b50\u5de5\u5b66\u7cfb<\/a><\/div><\/div>\n\n\n\n<p class=\"post-meta-prof has-sm-text-alt-color has-text-color\">\u897f\u4e2d\u6d69\u4e4b \u51c6\u6559\u6388\u3000NISHINAKA Hiroyuki<\/p>\n<\/div><\/div>\n<\/div><\/div>\n\n\n\n<div class=\"wp-block-snow-monkey-blocks-container smb-container c-container\"><div class=\"smb-container__body u-slim-width is-layout-constrained wp-block-container-is-layout-constrained\"><div id=\"ez-toc-container\" class=\"ez-toc-v2_0_71 counter-hierarchy ez-toc-counter ez-toc-grey ez-toc-container-direction\">\n<div class=\"ez-toc-title-container\">\n<p class=\"ez-toc-title\" style=\"cursor:inherit\">\u76ee\u6b21<\/p>\n<span class=\"ez-toc-title-toggle\"><a href=\"#\" class=\"ez-toc-pull-right ez-toc-btn ez-toc-btn-xs ez-toc-btn-default ez-toc-toggle\" aria-label=\"Toggle Table of Content\"><span class=\"ez-toc-js-icon-con\"><span class=\"\"><span class=\"eztoc-hide\" style=\"display:none;\">Toggle<\/span><span class=\"ez-toc-icon-toggle-span\"><svg style=\"fill: #999;color:#999\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\" class=\"list-377408\" width=\"20px\" height=\"20px\" viewBox=\"0 0 24 24\" fill=\"none\"><path d=\"M6 6H4v2h2V6zm14 0H8v2h12V6zM4 11h2v2H4v-2zm16 0H8v2h12v-2zM4 16h2v2H4v-2zm16 0H8v2h12v-2z\" fill=\"currentColor\"><\/path><\/svg><svg style=\"fill: #999;color:#999\" class=\"arrow-unsorted-368013\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\" width=\"10px\" height=\"10px\" viewBox=\"0 0 24 24\" version=\"1.2\" baseProfile=\"tiny\"><path d=\"M18.2 9.3l-6.2-6.3-6.2 6.3c-.2.2-.3.4-.3.7s.1.5.3.7c.2.2.4.3.7.3h11c.3 0 .5-.1.7-.3.2-.2.3-.5.3-.7s-.1-.5-.3-.7zM5.8 14.7l6.2 6.3 6.2-6.3c.2-.2.3-.5.3-.7s-.1-.5-.3-.7c-.2-.2-.4-.3-.7-.3h-11c-.3 0-.5.1-.7.3-.2.2-.3.5-.3.7s.1.5.3.7z\"\/><\/svg><\/span><\/span><\/span><\/a><\/span><\/div>\n<nav><ul class='ez-toc-list ez-toc-list-level-1 ' ><li class='ez-toc-page-1 ez-toc-heading-level-2'><a class=\"ez-toc-link ez-toc-heading-1\" href=\"https:\/\/www.liaison.kit.ac.jp\/chuumokukenkyu\/featured\/chuumokukenkyu202004\/#%E3%83%91%E3%83%AF%E3%83%BC%E3%83%87%E3%83%90%E3%82%A4%E3%82%B9\" title=\"\u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9\">\u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9<\/a><\/li><li class='ez-toc-page-1 ez-toc-heading-level-2'><a class=\"ez-toc-link ez-toc-heading-2\" href=\"https:\/\/www.liaison.kit.ac.jp\/chuumokukenkyu\/featured\/chuumokukenkyu202004\/#GaN_vs_%CE%B5-Ga2O3\" title=\"GaN vs \u03b5-Ga2O3\">GaN vs \u03b5-Ga2O3<\/a><\/li><li class='ez-toc-page-1 ez-toc-heading-level-2'><a class=\"ez-toc-link ez-toc-heading-3\" href=\"https:\/\/www.liaison.kit.ac.jp\/chuumokukenkyu\/featured\/chuumokukenkyu202004\/#%E3%83%9F%E3%82%B9%E3%83%88CVD\" title=\"\u30df\u30b9\u30c8CVD\">\u30df\u30b9\u30c8CVD<\/a><\/li><li class='ez-toc-page-1 ez-toc-heading-level-2'><a class=\"ez-toc-link ez-toc-heading-4\" href=\"https:\/\/www.liaison.kit.ac.jp\/chuumokukenkyu\/featured\/chuumokukenkyu202004\/#%CE%B5-Ga2O3%E3%81%AE%E6%88%90%E8%86%9C%E6%8A%80%E8%A1%93\" title=\"\u03b5-Ga2O3\u306e\u6210\u819c\u6280\u8853\">\u03b5-Ga2O3\u306e\u6210\u819c\u6280\u8853<\/a><\/li><li class='ez-toc-page-1 ez-toc-heading-level-2'><a class=\"ez-toc-link ez-toc-heading-5\" href=\"https:\/\/www.liaison.kit.ac.jp\/chuumokukenkyu\/featured\/chuumokukenkyu202004\/#%E3%83%8A%E3%83%8E%E6%A7%8B%E9%80%A0%E5%BD%A2%E6%88%90%E6%8A%80%E8%A1%93\" title=\"\u30ca\u30ce\u69cb\u9020\u5f62\u6210\u6280\u8853\">\u30ca\u30ce\u69cb\u9020\u5f62\u6210\u6280\u8853<\/a><\/li><li class='ez-toc-page-1 ez-toc-heading-level-2'><a class=\"ez-toc-link ez-toc-heading-6\" href=\"https:\/\/www.liaison.kit.ac.jp\/chuumokukenkyu\/featured\/chuumokukenkyu202004\/#%E7%A0%94%E7%A9%B6%E8%80%85%E3%83%97%E3%83%AD%E3%83%95%E3%82%A3%E3%83%BC%E3%83%AB\" title=\"\u7814\u7a76\u8005\u30d7\u30ed\u30d5\u30a3\u30fc\u30eb\">\u7814\u7a76\u8005\u30d7\u30ed\u30d5\u30a3\u30fc\u30eb<\/a><\/li><\/ul><\/nav><\/div>\n\n\n\n\n<h2 class=\"wp-block-heading\"><span class=\"ez-toc-section\" id=\"%E3%83%91%E3%83%AF%E3%83%BC%E3%83%87%E3%83%90%E3%82%A4%E3%82%B9\"><\/span>\u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9<span class=\"ez-toc-section-end\"><\/span><\/h2>\n\n\n\n<p>\u3000\u7701\u30a8\u30cd\u306e\u30ad\u30fc\u30c6\u30af\u30ce\u30ed\u30b8\u30fc\u3068\u3057\u3066\u671f\u5f85\u3055\u308c\u3066\u3044\u308b\u30d1\u30ef\u30fc\u534a\u5c0e\u4f53\u306f\u3001\u96fb\u529b\u5909\u63db\u7d20\u5b50\u3068\u3057\u3066\u69d8\u3005\u306a\u96fb\u5b50\u6a5f\u5668\u306b\u5229\u7528\u3055\u308c\u3066\u3044\u307e\u3059\u3002\u6b21\u4e16\u4ee3\u30d1\u30ef\u30fc\u534a\u5c0e\u4f53\u3068\u547c\u3070\u308c\u308b\u30ef\u30a4\u30c9\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\u534a\u5c0e\u4f53\u306f\u3001\u3088\u308a\u7701\u30a8\u30cd\u306a\u96fb\u529b\u5909\u63db\u7d20\u5b50\u306e\u6750\u6599\u3068\u3057\u3066\u6ce8\u76ee\u3055\u308c\u3066\u3044\u307e\u3059\u3002<br>\u3000\u305d\u306e\u30ef\u30a4\u30c9\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\u534a\u5c0e\u4f53\u306f\u9ad8\u8010\u5727\u30fb\u5927\u96fb\u6d41\u7528\u9014\u306eSiC\u3084\u9ad8\u5468\u6ce2\u7528\u9014\u306eGaN\u304c\u3042\u308a\u307e\u3059\u304c\u3001\u3053\u308c\u3089\u306e\u6750\u6599\u306f\u7814\u7a76\u6bb5\u968e\u304b\u3089\u793e\u4f1a\u5b9f\u88c5\u6bb5\u968e\u306b\u5165\u3063\u3066\u3044\u307e\u3059\u3002\u305d\u306e\u6b21\u306e\u7814\u7a76\u5bfe\u8c61\u3068\u3057\u3066\u3001Ga<sub>2<\/sub>O<sub>3<\/sub>(\u9178\u5316\u30ac\u30ea\u30a6\u30e0\uff09\u304c\u6ce8\u76ee\u3055\u308c\u3066\u3044\u307e\u3059\u3002Ga<sub>2<\/sub>O<sub>3<\/sub>\u306f\u69d8\u3005\u306a\u7d50\u6676\u69cb\u9020\u3092\u6301\u3064\u3053\u3068\u304c\u77e5\u3089\u308c\u3066\u3044\u307e\u3059\u304c\u3001\u672c\u7814\u7a76\u5ba4\u3067\u306fGaN\u306e\u4ee3\u308f\u308a\u3068\u3057\u3066\u671f\u5f85\u3055\u308c\u3066\u3044\u308b\u03b5-Ga<sub>2<\/sub>O<sub>3<\/sub>\u306e\u7814\u7a76\u3092\u9032\u3081\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<figure class=\"wp-block-image aligncenter size-full\"><img decoding=\"async\" width=\"1455\" height=\"957\" src=\"https:\/\/www.liaison.kit.ac.jp\/chuumokukenkyu\/wp-content\/uploads\/2023\/03\/chuumokukenkyu202004_01.png\" alt=\"\" class=\"wp-image-2573\" srcset=\"https:\/\/www.liaison.kit.ac.jp\/chuumokukenkyu\/wp-content\/uploads\/2023\/03\/chuumokukenkyu202004_01.png 1455w, https:\/\/www.liaison.kit.ac.jp\/chuumokukenkyu\/wp-content\/uploads\/2023\/03\/chuumokukenkyu202004_01-600x395.png 600w, https:\/\/www.liaison.kit.ac.jp\/chuumokukenkyu\/wp-content\/uploads\/2023\/03\/chuumokukenkyu202004_01-768x505.png 768w\" sizes=\"(max-width: 1455px) 100vw, 1455px\" \/><\/figure>\n\n\n\n<h2 class=\"wp-block-heading\"><span class=\"ez-toc-section\" id=\"GaN_vs_%CE%B5-Ga2O3\"><\/span>GaN vs \u03b5-Ga<sub>2<\/sub>O<sub>3<\/sub><span class=\"ez-toc-section-end\"><\/span><\/h2>\n\n\n\n<p>\u3000\u03b5-Ga<sub>2<\/sub>O<sub>3<\/sub>\u306fGaN\u3092\u8d85\u3048\u308b\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\u3001\u81ea\u767a\u5206\u6975\u3092\u6301\u3061\u3001\u3088\u308a\u9ad8\u8010\u5727\u3001\u4f4e\u62b5\u6297\u306a\u8d85\u7701\u30a8\u30cd\u30c7\u30d0\u30a4\u30b9\u304c\u671f\u5f85\u3055\u308c\u3066\u3044\u307e\u3059\u3002\u307e\u305f\u3001\u03b5-Ga<sub>2<\/sub>O<sub>3<\/sub>\u304c\u6301\u3064\u5f37\u8a98\u96fb\u4f53\u7279\u6027\u306f\u3001GaN\u3067\u306f\u4e0d\u53ef\u80fd\u3067\u3042\u3063\u305f\u65b0\u898f\u30c7\u30d0\u30a4\u30b9\u306e\u5b9f\u73fe\u3082\u671f\u5f85\u3055\u308c\u307e\u3059\u3002<br>\u3000\u901a\u5e38GaN\u306f\u30ce\u30fc\u30de\u30ea\u30fc\u30aa\u30f3\u578b\u3068\u547c\u3070\u308c\u308b\u30c7\u30d0\u30a4\u30b9\u3067\u3059\u304c\u3001\u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9\u3067\u306f\u30ce\u30fc\u30de\u30ea\u30fc\u30aa\u30f3\u52d5\u4f5c\u306f\u6545\u969c\u6642\u306e\u5b89\u5168\u6027\u304c\u62c5\u4fdd\u3067\u304d\u306a\u3044\u305f\u3081\u3001\u5bfe\u7b56\u304c\u5fc5\u9808\u3068\u306a\u3063\u3066\u3044\u307e\u3059\u3002\u3053\u306e\u03b5-Ga<sub>2<\/sub>O<sub>3<\/sub>\u306f\u5f37\u8a98\u96fb\u4f53\u3067\u3042\u308b\u305f\u3081\u3001\u305d\u306e\u5206\u6975\u306e\u65b9\u5411\u3092\u5909\u3048\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002\u3053\u306e\u5206\u6975\u3092\u5236\u5fa1\u3059\u308b\u3053\u3068\u3067\u539f\u7406\u7684\u306b\u30ce\u30fc\u30de\u30ea\u30fc\u30aa\u30d5\u52d5\u4f5c\u3092\u884c\u3046\u3053\u3068\u304c\u53ef\u80fd\u3068\u306a\u308a\u3001\u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9\u306e\u5b89\u5168\u6027\u3092\u62c5\u4fdd\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002<\/p>\n\n\n\n<figure class=\"wp-block-image size-full\"><img decoding=\"async\" width=\"1500\" height=\"994\" src=\"https:\/\/www.liaison.kit.ac.jp\/chuumokukenkyu\/wp-content\/uploads\/2023\/05\/chuumokukenkyu202004_02.png\" alt=\"\" class=\"wp-image-2574\" srcset=\"https:\/\/www.liaison.kit.ac.jp\/chuumokukenkyu\/wp-content\/uploads\/2023\/05\/chuumokukenkyu202004_02.png 1500w, https:\/\/www.liaison.kit.ac.jp\/chuumokukenkyu\/wp-content\/uploads\/2023\/05\/chuumokukenkyu202004_02-600x398.png 600w, https:\/\/www.liaison.kit.ac.jp\/chuumokukenkyu\/wp-content\/uploads\/2023\/05\/chuumokukenkyu202004_02-768x509.png 768w\" sizes=\"(max-width: 1500px) 100vw, 1500px\" \/><\/figure>\n\n\n\n<h2 class=\"wp-block-heading\"><span class=\"ez-toc-section\" id=\"%E3%83%9F%E3%82%B9%E3%83%88CVD\"><\/span>\u30df\u30b9\u30c8CVD<span class=\"ez-toc-section-end\"><\/span><\/h2>\n\n\n\n<p>\u3000\u03b5-Ga<sub>2<\/sub>O<sub>3<\/sub>\u306e\u6210\u819c\u3067\u306f\u30df\u30b9\u30c8CVD\u6cd5\u3068\u3044\u3046\u624b\u6cd5\u3092\u5229\u7528\u3057\u3066\u3044\u307e\u3059\u3002\u30df\u30b9\u30c8CVD\u6cd5\u306f\u3001\u6210\u819c\u3057\u305f\u3044\u6750\u6599\u306e\u524d\u99c6\u4f53\u3092\u6eb6\u89e3\u3055\u305b\u305f\u6eb6\u6db2\u3092\u5229\u7528\u3057\u3001\u305d\u306e\u6eb6\u6db2\u3092\u5674\u9727\u3057\u305f\u30df\u30b9\u30c8\u3092\u539f\u6599\u3068\u3059\u308b\u6210\u819c\u624b\u6cd5\u3067\u3059\u3002\u30df\u30b9\u30c8\u306e\u767a\u751f\u306b\u306f\u8d85\u97f3\u6ce2\u3092\u5229\u7528\u3057\u3066\u3044\u307e\u3059\u3002\u3053\u306e\u30df\u30b9\u30c8\u306f\u8033\u9f3b\u79d1\u306a\u3069\u3067\u5229\u7528\u3055\u308c\u3066\u3044\u308b\u30cd\u30d6\u30e9\u30a4\u30b6\u3084\u52a0\u6e7f\u5668\u306a\u3069\u3067\u5229\u7528\u3055\u308c\u3066\u304a\u308a\u3001\u30b9\u30a4\u30c3\u30c1\u4e00\u3064\u3067\u767a\u751f\u304c\u53ef\u80fd\u306a\u305f\u3081\u3001\u975e\u5e38\u306b\u7c21\u4fbf\u306b\u5229\u7528\u3067\u304d\u307e\u3059\u3002<br>\u3000\u30df\u30b9\u30c8CVD\u6cd5\u3067\u306f\u3001\u30df\u30b9\u30c8\u306e\u7c92\u5f84\u304c\u975e\u5e38\u306b\u5c0f\u3055\u3044\u306e\u3067\u3001\u305d\u306e\u30df\u30b9\u30c8\u306f\u52a0\u71b1\u306b\u3088\u3063\u3066\u5bb9\u6613\u306b\u6c17\u5316\u3057\u307e\u3059\u3002\u305d\u306e\u6c17\u5316\u3057\u305f\u539f\u6599\u306fCVD\u30d7\u30ed\u30bb\u30b9\u3092\u901a\u3057\u3066\u3001\u57fa\u677f\u4e0a\u306b\u76ee\u7684\u306e\u8584\u819c\u304c\u6210\u819c\u3055\u308c\u308b\u3053\u3068\u3068\u306a\u308a\u307e\u3059\u3002\u307e\u305f\u3001\u3053\u306e\u30df\u30b9\u30c8\u306f\u6e29\u5ea6\u306e\u9ad8\u3044\u57fa\u677f\u4e0a\u3067\u306f\u30e9\u30a4\u30c7\u30f3\u30d5\u30ed\u30b9\u30c8\u73fe\u8c61\u3068\u547c\u3070\u308c\u308b\u72b6\u614b\u304c\u767a\u751f\u3059\u308b\u305f\u3081\u3001\u30df\u30b9\u30c8\u304c\u57fa\u677f\u306b\u76f4\u63a5\u63a5\u89e6\u3057\u307e\u305b\u3093\u3002*<br>\u3000\u3053\u306e\u30e9\u30a4\u30c7\u30f3\u30d5\u30ed\u30b9\u30c8\u73fe\u8c61\u306f\u71b1\u3057\u305f\u30d5\u30e9\u30a4\u30d1\u30f3\u306b\u6c34\u3092\u5782\u3089\u3057\u305f\u3068\u304d\u306b\u3001\u6c34\u304c\u30d5\u30e9\u30a4\u30d1\u30f3\u3092\u8d70\u308a\u56de\u308b\u73fe\u8c61\u3067\u3059\u3002\u30e9\u30a4\u30c7\u30f3\u30d5\u30ed\u30b9\u30c8\u73fe\u8c61\u306b\u3088\u308a\u30df\u30b9\u30c8\u306f\u3001\u6c17\u4f53\u3068\u306a\u3063\u3066\u5747\u4e00\u306b\u6210\u819c\u3055\u308c\u307e\u3059\u3002<br>\u3000\u307e\u305f\u30df\u30b9\u30c8CVD\u6cd5\u306f\u6eb6\u6db2\u306b\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u308c\u3070\u3001\u3069\u306e\u3088\u3046\u306a\u539f\u6599\u3082\u5229\u7528\u3067\u304d\u308b\u3068\u3044\u3063\u305f\u7279\u5fb4\u304c\u3042\u308a\u3001\u6570\u591a\u304f\u306e\u9178\u5316\u7269\u8584\u819c\u306e\u6210\u819c\u306b\u6210\u529f\u3057\u3066\u3044\u307e\u3059\u3002\u30df\u30b9\u30c8CVD\u6cd5\u306e\u88c5\u7f6e\u3068\u3057\u3066\u30013\u3064\u306e\u6210\u819c\u88c5\u7f6e\u3092\u958b\u767a\u3057\u3066\u3044\u307e\u3059\u3002\u305d\u308c\u305e\u308c\u6210\u819c\u6750\u6599\u3084\u7528\u9014\u306b\u5408\u308f\u305b\u3066\u4f7f\u3044\u5206\u3051\u3092\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<p>*&nbsp;<a rel=\"noreferrer noopener\" href=\"http:\/\/www.kochi-tech.ac.jp\/kut\/CuttingEdge\/research\/04.html\" target=\"_blank\">\uff08\u53c2\u8003\uff09\u9ad8\u77e5\u5de5\u79d1\u5927\u5b66\u3000\u5ddd\u539f\u6751\u654f\u5e78\u300c\u9ad8\u54c1\u8cea\u306a\u6a5f\u80fd\u6027\u8584\u819c\u306e\u4f5c\u88fd\u3092\u5b9f\u73fe\u3059\u308b\u975e\u771f\u7a7a\u30d7\u30ed\u30bb\u30b9\u306e\u958b\u767a\u300d<\/a>\uff08\u5916\u90e8\u30ea\u30f3\u30af\uff09<\/p>\n\n\n\n<figure class=\"wp-block-image size-full\"><img decoding=\"async\" width=\"1920\" height=\"1589\" src=\"https:\/\/www.liaison.kit.ac.jp\/chuumokukenkyu\/wp-content\/uploads\/2023\/05\/chuumokukenkyu202004_03.png\" alt=\"\" class=\"wp-image-2577\" srcset=\"https:\/\/www.liaison.kit.ac.jp\/chuumokukenkyu\/wp-content\/uploads\/2023\/05\/chuumokukenkyu202004_03.png 1920w, https:\/\/www.liaison.kit.ac.jp\/chuumokukenkyu\/wp-content\/uploads\/2023\/05\/chuumokukenkyu202004_03-600x497.png 600w, https:\/\/www.liaison.kit.ac.jp\/chuumokukenkyu\/wp-content\/uploads\/2023\/05\/chuumokukenkyu202004_03-768x636.png 768w, https:\/\/www.liaison.kit.ac.jp\/chuumokukenkyu\/wp-content\/uploads\/2023\/05\/chuumokukenkyu202004_03-1536x1271.png 1536w\" sizes=\"(max-width: 1920px) 100vw, 1920px\" \/><\/figure>\n\n\n\n<h2 class=\"wp-block-heading\"><span class=\"ez-toc-section\" id=\"%CE%B5-Ga2O3%E3%81%AE%E6%88%90%E8%86%9C%E6%8A%80%E8%A1%93\"><\/span>\u03b5-Ga<sub>2<\/sub>O<sub>3<\/sub>\u306e\u6210\u819c\u6280\u8853<span class=\"ez-toc-section-end\"><\/span><\/h2>\n\n\n\n<p>\u3000\u03b5-Ga<sub>2<\/sub>O<sub>3<\/sub>\u306e\u6210\u819c\u3067\u306f\u3001\u534a\u5c0e\u4f53\u3068\u3057\u3066\u5229\u7528\u53ef\u80fd\u306a\u539f\u5b50\u30ec\u30d9\u30eb\u3067\u5e73\u5766\u306a\u8584\u819c\u306e\u6210\u819c\u306b\u6210\u529f\u3057\u3066\u3044\u307e\u3059\u3002\u3053\u306e\u6bb5\u5dee\u306f\u03b5-Ga<sub>2<\/sub>O<sub>3<\/sub>\u306e\u7d50\u6676\u306e\u534a\u5206\u306e\u30b5\u30a4\u30ba\u3067\u3042\u308a\u3001\u539f\u5b50\u30ec\u30d9\u30eb\u3067\u5e73\u5766\u3067\u3042\u308b\u3053\u3068\u3092\u793a\u3057\u3066\u3044\u307e\u3059\u3002<br>\u3000\u307e\u305f\u3001\u3053\u306e\u6bb5\u5dee\u306f0.5nm\u7a0b\u5ea6\u3068\u5c0f\u3055\u306a\u6bb5\u5dee\u3067\u3059\u304c\u3001\u3053\u306e\u3088\u3046\u306a\u975e\u5e38\u306b\u5c0f\u3055\u306a\u6bb5\u5dee\u3092\u3088\u308a\u5927\u304d\u306a\u6570\u03bcm\u306e\u30df\u30b9\u30c8\u3092\u7528\u3044\u3066\u3082\u5f62\u6210\u3059\u308b\u3053\u3068\u306b\u6210\u529f\u3057\u3066\u3044\u307e\u3059\u3002\u3053\u308c\u306f\u30df\u30b9\u30c8\u304c\u76f4\u63a5\u57fa\u677f\u4e0a\u306b\u63a5\u89e6\u3059\u308b\u306e\u3067\u306f\u306a\u304f\u3001\u6c17\u4f53\u3067\u53cd\u5fdc\u3057\u6210\u819c\u3055\u308c\u3066\u3044\u308b\u3053\u3068\u3092\u793a\u3057\u3066\u3044\u307e\u3059\u3002\u03b5-Ga<sub>2<\/sub>O<sub>3<\/sub>\u3067\u3053\u306e\u3088\u3046\u306a\u539f\u5b50\u30ec\u30d9\u30eb\u3067\u5e73\u5766\u306a\u819c\u3092\u5f97\u3089\u308c\u305f\u7d50\u679c\u306f\u3001\u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9\u5fdc\u7528\u306b\u5411\u3051\u3066\u5927\u304d\u306a\u9032\u5c55\u3092\u3057\u305f\u3068\u8a00\u3048\u307e\u3059\u3002<br>\u3000\u3055\u3089\u306b\u3001\u30df\u30b9\u30c8CVD\u6cd5\u306e\u6eb6\u6db2\u306b\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u308c\u3070\u3069\u306e\u3088\u3046\u306a\u6750\u6599\u3082\u5229\u7528\u3067\u304d\u308b\u3068\u3044\u3063\u305f\u7279\u5fb4\u3092\u6d3b\u304b\u3057\u3001Ga\u306e\u539f\u6599\u306bAl\u3084In\u306e\u539f\u6599\u3092\u4e00\u7dd2\u306b\u6df7\u305c\u308b\u3053\u3068\u3067\u6df7\u6676\u534a\u5c0e\u4f53\u306e\u5f62\u6210\u306b\u6210\u529f\u3057\u307e\u3057\u305f\u3002\u6df7\u6676\u534a\u5c0e\u4f53\u306f\u5316\u5408\u7269\u534a\u5c0e\u4f53\u306e\u57fa\u76e4\u6280\u8853\u3067\u3042\u308a\u3001\u3053\u308c\u3089\u306e\u7d50\u679c\u3082\u307e\u305f\u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9\u5fdc\u7528\u306b\u5411\u3051\u305f\u5927\u304d\u306a\u9032\u5c55\u3002<\/p>\n\n\n\n<figure class=\"wp-block-image size-full\"><img decoding=\"async\" width=\"1920\" height=\"865\" src=\"https:\/\/www.liaison.kit.ac.jp\/chuumokukenkyu\/wp-content\/uploads\/2023\/05\/chuumokukenkyu202004_04.png\" alt=\"\" class=\"wp-image-2578\" srcset=\"https:\/\/www.liaison.kit.ac.jp\/chuumokukenkyu\/wp-content\/uploads\/2023\/05\/chuumokukenkyu202004_04.png 1920w, https:\/\/www.liaison.kit.ac.jp\/chuumokukenkyu\/wp-content\/uploads\/2023\/05\/chuumokukenkyu202004_04-600x270.png 600w, https:\/\/www.liaison.kit.ac.jp\/chuumokukenkyu\/wp-content\/uploads\/2023\/05\/chuumokukenkyu202004_04-768x346.png 768w, https:\/\/www.liaison.kit.ac.jp\/chuumokukenkyu\/wp-content\/uploads\/2023\/05\/chuumokukenkyu202004_04-1536x692.png 1536w\" sizes=\"(max-width: 1920px) 100vw, 1920px\" \/><\/figure>\n\n\n\n<h2 class=\"wp-block-heading\"><span class=\"ez-toc-section\" id=\"%E3%83%8A%E3%83%8E%E6%A7%8B%E9%80%A0%E5%BD%A2%E6%88%90%E6%8A%80%E8%A1%93\"><\/span>\u30ca\u30ce\u69cb\u9020\u5f62\u6210\u6280\u8853<span class=\"ez-toc-section-end\"><\/span><\/h2>\n\n\n\n<p>\u3000\u30df\u30b9\u30c8CVD\u6cd5\u306f\u8584\u819c\u3060\u3051\u3067\u306a\u304f\u3001\u30ca\u30ce\u69cb\u9020\u4f53\u306e\u5f62\u6210\u306b\u3082\u5229\u7528\u3067\u304d\u307e\u3059\u3002\u56f3\u306e\u3088\u3046\u306b\u30df\u30b9\u30c8CVD\u6cd5\u3067\u5c0e\u96fb\u6027\u306eITO\u30ca\u30ce\u69cb\u9020\u4f53\u306e\u5f62\u6210\u306b\u6210\u529f\u3057\u307e\u3057\u305f\u3002<br>\u3000\u307e\u305f\u3001\u65b0\u3057\u3044\u30ca\u30ce\u69cb\u9020\u4f53\u5f62\u6210\u6280\u8853\u306b\u95a2\u3059\u308b\u7814\u7a76\u3082\u9032\u3081\u3066\u304a\u308a\u3001\u30df\u30b9\u30c8CVD\u6cd5\u3067\u5f62\u6210\u3057\u305f\u8584\u819c\u3068SEM\u3092\u4f7f\u3063\u3066\u3001\u30ca\u30ce\u30b5\u30a4\u30ba\u306e\u6587\u5b57\u3092\u66f8\u304f\u3053\u3068\u306b\u6210\u529f\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<figure class=\"wp-block-image size-full\"><img decoding=\"async\" width=\"1439\" height=\"612\" src=\"https:\/\/www.liaison.kit.ac.jp\/chuumokukenkyu\/wp-content\/uploads\/2023\/05\/chuumokukenkyu202004_05.jpg\" alt=\"\" class=\"wp-image-2579\" srcset=\"https:\/\/www.liaison.kit.ac.jp\/chuumokukenkyu\/wp-content\/uploads\/2023\/05\/chuumokukenkyu202004_05.jpg 1439w, https:\/\/www.liaison.kit.ac.jp\/chuumokukenkyu\/wp-content\/uploads\/2023\/05\/chuumokukenkyu202004_05-600x255.jpg 600w, https:\/\/www.liaison.kit.ac.jp\/chuumokukenkyu\/wp-content\/uploads\/2023\/05\/chuumokukenkyu202004_05-768x327.jpg 768w\" sizes=\"(max-width: 1439px) 100vw, 1439px\" \/><\/figure>\n\n\n\n<h2 class=\"wp-block-heading has-text-align-center h-prof\"><span class=\"ez-toc-section\" id=\"%E7%A0%94%E7%A9%B6%E8%80%85%E3%83%97%E3%83%AD%E3%83%95%E3%82%A3%E3%83%BC%E3%83%AB\"><\/span>\u7814\u7a76\u8005\u30d7\u30ed\u30d5\u30a3\u30fc\u30eb<span class=\"ez-toc-section-end\"><\/span><\/h2>\n\n\n\n<div class=\"wp-block-snow-monkey-blocks-box smb-box\" style=\"--smb-box--border-radius:0px;--smb-box--background-color:#f9f9f9;--smb-box--background-opacity:1;--smb-box--border-width:0px\"><div class=\"smb-box__background\"><\/div><div class=\"smb-box__body is-layout-constrained wp-block-box-is-layout-constrained\">\n<div class=\"wp-block-snow-monkey-blocks-container smb-container c-container smb-container--no-gutters\"><div class=\"smb-container__body is-layout-constrained wp-block-container-is-layout-constrained\" style=\"width:300px\">\n<div class=\"wp-block-columns are-vertically-aligned-center is-not-stacked-on-mobile is-layout-flex wp-container-core-columns-is-layout-1 wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-vertically-aligned-center is-layout-flow wp-block-column-is-layout-flow\" style=\"flex-basis:100px\">\n<figure class=\"wp-block-image size-full\"><img decoding=\"async\" width=\"338\" height=\"440\" src=\"https:\/\/www.liaison.kit.ac.jp\/chuumokukenkyu\/wp-content\/uploads\/2020\/04\/chuumokukenkyu202004_90.jpg\" alt=\"\" class=\"wp-image-2580\"\/><\/figure>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-vertically-aligned-center is-layout-flow wp-block-column-is-layout-flow\"><div class=\"taxonomy-index prof-index wp-block-post-terms\"><a href=\"https:\/\/www.liaison.kit.ac.jp\/chuumokukenkyu\/index\/electrical-and-electronic-engineering\/\" rel=\"tag\">04.\u96fb\u6c17\u96fb\u5b50\u5de5\u5b66\u7cfb<\/a><\/div>\n\n\n<p class=\"prof-name\">\u897f\u4e2d\u6d69\u4e4b \u51c6\u6559\u6388<\/p>\n\n\n\n<p class=\"prof-name-kana\">\u306b\u3057\u306a\u304b \u3072\u308d\u3086\u304d<\/p>\n<\/div>\n<\/div>\n<\/div><\/div>\n\n\n\n<div class=\"wp-block-snow-monkey-blocks-box smb-box smb-box--p-s box-prof-link\" style=\"--smb-box--background-color:#ffffff;--smb-box--background-opacity:0.7;--smb-box--border-width:0px\"><div class=\"smb-box__background\"><\/div><div class=\"smb-box__body is-layout-constrained wp-block-box-is-layout-constrained\">\n<div class=\"wp-block-columns box-profile is-layout-flex wp-container-core-columns-is-layout-4 wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-vertically-aligned-top is-layout-flow wp-block-column-is-layout-flow\">\n<div class=\"wp-block-columns is-not-stacked-on-mobile is-layout-flex wp-container-core-columns-is-layout-2 wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\" style=\"flex-basis:30%\"><\/div>\n\n\n\n<div class=\"wp-block-column is-vertically-aligned-center is-layout-flow wp-block-column-is-layout-flow\"><\/div>\n<\/div>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\">\n<div class=\"wp-block-columns is-not-stacked-on-mobile is-layout-flex wp-container-core-columns-is-layout-3 wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\" style=\"flex-basis:30%\">\n<figure class=\"wp-block-image size-full\"><img decoding=\"async\" width=\"416\" height=\"233\" src=\"https:\/\/www.liaison.kit.ac.jp\/chuumokukenkyu\/wp-content\/uploads\/2023\/03\/img-handbook.png\" alt=\"\" class=\"wp-image-1244\"\/><\/figure>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-vertically-aligned-center is-layout-flow wp-block-column-is-layout-flow\">\n<div class=\"wp-block-snow-monkey-blocks-list smb-list\" data-icon=\"circle-right\"><ul><li><a href=\"https:\/\/www.liaison.kit.ac.jp\/researchers_db\/introduction\/elec_eng_elec\/%e8%a5%bf%e4%b8%ad%e3%80%80%e6%b5%a9%e4%b9%8b\"><strong><strong>\u7d39\u4ecb\u6559\u54e1\u3092\u898b\u308b<\/strong><\/strong><\/a><br><span class=\"sme-font-size has-sm-s-font-size\">\u7814\u7a76\u8005\u30cf\u30f3\u30c9\u30d6\u30c3\u30af<\/span><\/li><\/ul><\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div><\/div>\n\n\n\n<div style=\"height:1px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h4 class=\"wp-block-heading has-text-align-center\">\u4e3b\u306a\u767a\u8868\u8ad6\u6587\u30fb\u95a2\u9023\u7279\u8a31<\/h4>\n\n\n<div class=\"lightweight-accordion\"><details><summary class=\"lightweight-accordion-title\"><span>Heteroepitaxial growth of \u03b5-Ga<sub>2<\/sub>O<sub>3<\/sub>\u00a0thin films on cubic (111) MgO and (111) yttria-stablized zirconia substrates by mist chemical vapor deposition<\/span><\/summary><div class=\"lightweight-accordion-body\">\n\n<p>\u8457\u8005\u540d : H. Nishinaka, D. Tahara, and M. Yoshimoto<br>\u63b2\u8f09\u8a8c\u540d : Jpn. J. Appl. Phys<br>\u51fa\u7248\u5e74\u6708 : 2016\u5e7411\u6708<br>\u5dfb\u30fb\u53f7\u30fb\u9801 : 56, 1202BC<br><span class=\"sme-font-size has-sm-s-font-size\"><br><\/span>Free:&nbsp;<a rel=\"noreferrer noopener\" href=\"https:\/\/iopscience.iop.org\/article\/10.7567\/JJAP.55.1202BC\/\" target=\"_blank\">https:\/\/iopscience.iop.org\/article\/10.7567\/JJAP.55.1202BC\/<\/a>\uff08\u5916\u90e8\u30ea\u30f3\u30af\uff09<\/p>\n\n<\/div><\/details><\/div>\n\n<div class=\"lightweight-accordion\"><details><summary class=\"lightweight-accordion-title\"><span>CrystEngComm<\/span><\/summary><div class=\"lightweight-accordion-body\">\n\n<p>\u8457\u8005\u540d : H. Nishinaka, N. Miyauchi, D. Tahara, and M. Yoshimoto<br>\u51fa\u7248\u5e74\u6708 : 2018\u5e74<br>\u5dfb\u30fb\u53f7\u30fb\u9801 : 20, 1882-1888<\/p>\n\n<\/div><\/details><\/div>\n\n<div class=\"lightweight-accordion\"><details><summary class=\"lightweight-accordion-title\"><span>Crystal Growth &amp; Design<\/span><\/summary><div class=\"lightweight-accordion-body\">\n\n<p>\u8457\u8005\u540d : H. Nishinaka, and M. Yoshimoto<br>\u51fa\u7248\u5e74\u6708 : 2018\u5e74<br>\u5dfb\u30fb\u53f7\u30fb\u9801 : 18, 4022-4028<\/p>\n\n<\/div><\/details><\/div><\/div><\/div>\n\n\n\n<div class=\"wp-block-snow-monkey-blocks-list smb-list\" data-icon=\"circle-right\"><ul><li><a rel=\"noreferrer noopener\" href=\"https:\/\/www.liaison.kit.ac.jp\/index.php\" target=\"_blank\"><strong>\u7523\u5b66\u9023\u643a\u3084\u7814\u7a76\u652f\u63f4\u306b\u8208\u5473\u304c\u3042\u308b\u65b9<\/strong><\/a>\uff08\u7523\u5b66\u516c\u9023\u643a\u63a8\u9032\u30bb\u30f3\u30bf\u30fcHP\uff09<\/li><li><a href=\"https:\/\/www.kit.ac.jp\/application\/view\/index.php?id=283059\" data-type=\"URL\" data-id=\"https:\/\/www.kit.ac.jp\/application\/view\/index.php?id=283059\"><strong>\u7d39\u4ecb\u6559\u54e1\u306b\u30e1\u30c3\u30bb\u30fc\u30b8\u3092\u9001\u308a\u305f\u3044\u65b9<\/strong><\/a>\uff08\u30e1\u30c3\u30bb\u30fc\u30b8\u30d5\u30a9\u30fc\u30e0\uff09<\/li><li><a href=\"https:\/\/www.kit.ac.jp\/fund_index\/\"><strong>\u5927\u5b66\u3084\u5b66\u751f\u3092\u652f\u63f4\u3057\u305f\u3044\u65b9<\/strong><\/a>\uff08\u57fa\u91d1\u4e8b\u696d\uff09<\/li><li><a href=\"https:\/\/www.kit.ac.jp\/test_index\/\"><strong>\u53d7\u9a13\u3092\u8003\u3048\u3066\u3044\u308b\u65b9<\/strong><\/a>\uff08\u5165\u8a66\u60c5\u5831\uff09<\/li><li><a href=\"https:\/\/www.kit.ac.jp\/\"><strong>\u5927\u5b66\u5168\u4f53\u306b\u3064\u3044\u3066\u77e5\u308a\u305f\u3044\u65b9<\/strong><\/a>\uff08\u4eac\u90fd\u5de5\u82b8\u7e4a\u7dad\u5927\u5b66HP\uff09<\/li><\/ul><\/div>\n<\/div><\/div>\n","protected":false},"excerpt":{"rendered":"","protected":false},"author":2,"featured_media":2572,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","format":"standard","meta":{"footnotes":"","wp-seo-meta-description":"","wp-seo-meta-robots":[]},"index":[34],"post_year":[50],"class_list":{"0":"post-2570","1":"featured","2":"type-featured","3":"status-publish","4":"format-standard","5":"has-post-thumbnail","7":"index-electrical-and-electronic-engineering","8":"post_year-50","9":"c-entry"},"_links":{"self":[{"href":"https:\/\/www.liaison.kit.ac.jp\/chuumokukenkyu\/wp-json\/wp\/v2\/featured\/2570","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.liaison.kit.ac.jp\/chuumokukenkyu\/wp-json\/wp\/v2\/featured"}],"about":[{"href":"https:\/\/www.liaison.kit.ac.jp\/chuumokukenkyu\/wp-json\/wp\/v2\/types\/featured"}],"author":[{"embeddable":true,"href":"https:\/\/www.liaison.kit.ac.jp\/chuumokukenkyu\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/www.liaison.kit.ac.jp\/chuumokukenkyu\/wp-json\/wp\/v2\/comments?post=2570"}],"version-history":[{"count":3,"href":"https:\/\/www.liaison.kit.ac.jp\/chuumokukenkyu\/wp-json\/wp\/v2\/featured\/2570\/revisions"}],"predecessor-version":[{"id":2664,"href":"https:\/\/www.liaison.kit.ac.jp\/chuumokukenkyu\/wp-json\/wp\/v2\/featured\/2570\/revisions\/2664"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.liaison.kit.ac.jp\/chuumokukenkyu\/wp-json\/wp\/v2\/media\/2572"}],"wp:attachment":[{"href":"https:\/\/www.liaison.kit.ac.jp\/chuumokukenkyu\/wp-json\/wp\/v2\/media?parent=2570"}],"wp:term":[{"taxonomy":"index","embeddable":true,"href":"https:\/\/www.liaison.kit.ac.jp\/chuumokukenkyu\/wp-json\/wp\/v2\/index?post=2570"},{"taxonomy":"post_year","embeddable":true,"href":"https:\/\/www.liaison.kit.ac.jp\/chuumokukenkyu\/wp-json\/wp\/v2\/post_year?post=2570"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}